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A method of fabrication of micro-devices

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A micro-electro-mechanical-system two dimensional mirror...

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Acoustically actuated mems devices

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Actuator element

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Actuator in a microfluidic system for inducing...

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Actuator on the basis of geometrically anisotropic...

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Actuators including serpentine arrangements of alternating...

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Apparatus and methods for arranging devices into an...

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Apparatus for downhole fluids analysis utilizing micro...

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Articulated mems structures

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