A method of fabrication of micro-devices
A micro-electro-mechanical-system two dimensional mirror...
Acoustically actuated mems devices
Actuator element
Actuator in a microfluidic system for inducing...
Actuator on the basis of geometrically anisotropic...
Actuators including serpentine arrangements of alternating...
Apparatus and methods for arranging devices into an...
Apparatus for downhole fluids analysis utilizing micro...
Articulated mems structures