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Temperature compensated microelectromechanical structures...

B - Operations – Transporting – 81 – B
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Thermal actuator shaped for more uniform temperature profile

B - Operations – Transporting – 81 – B
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Thermal bend actuator for a micro electro-mechanical device

B - Operations – Transporting – 81 – B
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Thermally actuated microelectromechanical systems including...

B - Operations – Transporting – 81 – B
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Thermally efficient micromachined device

B - Operations – Transporting – 81 – B
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Thermally-activated microchip chemical delivery devices

B - Operations – Transporting – 81 – B
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Tiled microelectromechanical device modules and fabrication...

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Two-step electrode for mems micromirrors

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