Articulated mems structures

Details Articulated mems structures Articulated mems structures

B - Operations, Transporting

81

B

B81B 5/00 (2006.01) B81B 3/00 (2006.01) B81B 7/02 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2536722

The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.

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