A micro-electro-mechanical-system two dimensional mirror...

B - Operations – Transporting – 81 – B

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B81B 3/00 (2006.01) G02B 26/08 (2006.01) H04J 14/02 (2006.01)

Patent

CA 2522790

The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.

L'invention concerne un dispositif miroir à système micro-électro-mécanique (MEMS) comprenant un miroir ayant, à une première extrémité, une articulation rotative bidimensionnelle et, à la deuxième extrémité opposée à la première extrémité, une articulation rotative unidimensionnelle; un élément en porte-à-faux mobile relié au miroir par l'articulation rotative unidimensionnelle; une structure support connectée au miroir par l'articulation rotative bidimensionnelle et connectée à l'élément en porte-à-faux mobile. Le mouvement de cet élément en porte-à-faux mobile engendre la rotation du miroir dans un premier axe de rotation, et le miroir tourne également autour d'un deuxième axe de rotation perpendiculaire au premier axe de rotation.

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