Acoustically actuated mems devices

Details Acoustically actuated mems devices Acoustically actuated mems devices

B - Operations, Transporting

81

B

B81B 5/00 (2006.01) B81B 7/00 (2006.01)

Patent

CA 2352653

The invention provides a MEMS acoustic actuator having a substrate, an acoustic wave generator for generating an acoustic wave, the acoustic wave generator is disposed on the substrate, and a moveable element for receiving the acoustic wave, said moveable element is operatively connected to the acoustic wave generator such that the acoustic wave generator is capable of exerting sufficient acoustic radiation pressure for moving the moveable element. The moveable element has a planar surface for receiving and deflecting the acoustic wave.

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