Bi-stable micro-actuator and optical switch

Details Bi-stable micro-actuator and optical switch Bi-stable micro-actuator and optical switch

B - Operations, Transporting

81

B

B81B 3/00 (2006.01) B81B 7/00 (2006.01) B81B 7/02 (2006.01) B81C 1/00 (2006.01) G02B 6/35 (2006.01) G02B 26/02 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2438727

A bi-stable micro-actuator is formed from a first and a second silicon-on- insulator wafer fused together at an electrical contact layer. A cover has a V- groove that defines an optical axis. A collimated optical signal source in the V-groove couples an optical signal to an optical port in the V-groove. A mirror surface on the transfer member blocks or reflects the optical signal. The transfer member has a point of support at the first and second end. The central portion of the transfer member carrying a mirror is displaced from the compressive axis with transfer member in a bowed first or second state. The mirror blocks or reflects the optical axis. An expandable structure applies a compressive force between the first and second point of support along the compressive axis to hold the transfer member in a bowed first state or a bowed second state. A control signal is applied to a heating element in the expandable structure to reduce the compressive force transferring the transfer member to a second state. The central portion of the transfer member moves from a bowed first state past the compressive axis into a bowed second state to clear the optical axis.

L'invention porte sur un micro-actionneur bistable form~ de deux tranches silicium sur isolateur fusionn~es au niveau d'une couche ~lectrique de contact, et comportant: un couvercle pr~sentant une rainure en V d~finissant un axe optique; une source de signal optique collimat~ plac~e dans la rainure et couplant un signal optique ~ un port optique situ~ dans la rainure; un ~l~ment de transfert; une surface de miroir plac~e sur l'~l~ment de transfert et bloquant ou r~fl~chissant le signal optique. L'~l~ment de transfert pr~sente un point de support ~ sa premi­re et ~ sa deuxi­me extr~mit~. La partie centrale de l'~l~ment de transfert comporte un miroir se d~pla×ant avec l'~l~ment de transfert ~ partir de l'axe de compression vers un premier et un deuxi­me ~tat incurv~. Le miroir bloque ou refl­te l'axe optique. Une structure dilatable applique une force de compression entre le premier et le deuxi­me point de support le long de l'axe de compression pour maintenir l'~l~ment de transfert dans le premier ou le deuxi­me ~tat incurv~. La partie centrale de l'~l~ment de transfert passe du premier ~tat incurv~ au deuxi­me ~tat incurv~ en traversant l'axe de compression pour d~gager l'axe optique.

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