Imaging technique for use with optical mems devices
Implant having mems flow module with movable,...
Improved methods of fabricating microelectromechanical and...
In situ mixing in microchannels
In-plane mems thermal actuator and associated fabrication...
Integrated electrical cross-talk walls for electrostatic mems
Integrated mems packaging
Interferometric modulator array with integrated mems...
Interlaced array of piano mems micromirrors