Managing bubbles in a fluid-ejection device
Measurement and apparatus for electrical measurement of...
Mems actuators
Mems actuators and switches
Mems actuators and switches
Mems based rf components with vertical motion and...
Mems bubble generator for large stable vapor bubbles
Mems device with independent rotation in two axes of rotation
Mems device with integrated via and spacer
Mems devices having support structures and methods of...
Mems magnetically actuated switches and associated switching...
Mems microswitch having a conductive mechanical stop
Mems microswitch having a dual actuator and shared gate
Mems switch with improved standoff voltage control
Mems-based micro and nano grippers with two-axis force sensors
Mems-based nanomanipulators/nanopositioners
Mems-based nanopositioners and nanomanipulators
Merged-mask micro-machining process
Metal mems devices and methods of making same
Method and apparatus for continuous liquid flow in...