Mems-based nanomanipulators/nanopositioners

Details Mems-based nanomanipulators/nanopositioners Mems-based nanomanipulators/nanopositioners

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) B81B 3/00 (2006.01) B82B 3/00 (2006.01)

Patent

CA 2551194

The present invention provides a MEMS-based nanomanipulator that can achieve both sub--nanometer resolution and millimeter force output. The present invention further provides an integrated displacement sensor to obtain position feedback that will enable precise closed-loop control during nanomanipulation.

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