Mems microswitch having a conductive mechanical stop

Details Mems microswitch having a conductive mechanical stop Mems microswitch having a conductive mechanical stop

B - Operations, Transporting

81

B

B81B 3/00 (2006.01) B81B 7/02 (2006.01) B81B 7/04 (2006.01)

Patent

CA 2645834

A MEMS switch (30, 50, 60, 70, 80) includes a substrate (32), a movable actuator (53, 63, 83) coupled to the substrate (32), a substrate contact (35, 85), a substrate electrode (36, 56, 86), and a conductive stopper (39, 59, 69, 79) electrically coupled to the movable actuator (33, 63, 83) and structured to prevent the movable actuator (33, 63, 83) from contacting the substrate electrode (36, 56, 86) while allowing the movable actuator (33, 63, 83) to make contact with the substrate contact (35, 85).

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