Mems switch with improved standoff voltage control

Details Mems switch with improved standoff voltage control Mems switch with improved standoff voltage control

B - Operations, Transporting

81

B

B81B 7/02 (2006.01) B81B 7/04 (2006.01) B81C 1/00 (2006.01) H01H 45/00 (2006.01)

Patent

CA 2647126

A MEMS switch (20, 30, 40) is provided including a substrate (28), a movable actuator (22, 32, 132) coupled to the substrate (28) and having a first side and a second side, a first fixed electrode (24) coupled to the substrate (28) and positioned on the first side of the movable actuator (22, 32, 132) to generate a first actuation force to pull the movable actuator (22, 32, 132) toward a conduction state, and a second fixed electrode (27, 37, 47) coupled to the substrate (28) and positioned on the second side of the movable actuator (22, 32, 132) to generate a second actuation force to pull the movable actuator (22, 32, 132) toward a non-conducting state.

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