Mems microswitch having a dual actuator and shared gate

Details Mems microswitch having a dual actuator and shared gate Mems microswitch having a dual actuator and shared gate

B - Operations, Transporting

81

B

B81B 7/02 (2006.01) H01H 45/00 (2006.01)

Patent

CA 2645820

In accordance with one aspect of the present invention, a MEMS switch (10,30,40) is provided. The MEMS switch (10,30,40) includes a substrate (12), a first (21,41) and a second (22,42) actuating element electrically coupled together, an anchor (18) mechanically coupled to the substrate (12) and supporting at least one of the first (21,41) and second (22,42) actuating elements, and a gate driver (6) configured to actuate the first (21,41) and second (22,42) actuating elements.

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