B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 7/02 (2006.01) B81B 3/00 (2006.01) B81B 5/00 (2006.01) G02B 26/08 (2006.01) H01L 23/52 (2006.01)
Patent
CA 2722783
A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rota-tion in the second axis of rotation.
Linvention concerne un montage de microsystème électromécanique (MEMS) présentant un plan supérieur contenant un élément rotatif comme un miroir. Il existe un plan de structure de support intermédiaire et un plan de substrat électrique inférieur. Lélément rotatif est supporté par une structure de support formée dans le plan de structure de support intermédiaire de manière à pouvoir tourner par rapport à la structure dans un premier axe de rotation. La structure est montée de manière à pouvoir tourner par rapport à un second axe de rotation. La rotation dans le premier axe de rotation est sensiblement indépendante de la rotation dans le second axe de rotation.
Crawford Jared
Keyworth Barrie
Kornelsen Kevin
Micralyne Inc.
Smart & Biggar
LandOfFree
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