Mems device with independent rotation in two axes of rotation

B - Operations – Transporting – 81 – B

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

B81B 7/02 (2006.01) B81B 3/00 (2006.01) B81B 5/00 (2006.01) G02B 26/08 (2006.01) H01L 23/52 (2006.01)

Patent

CA 2722783

A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rota-tion in the second axis of rotation.

Linvention concerne un montage de microsystème électromécanique (MEMS) présentant un plan supérieur contenant un élément rotatif comme un miroir. Il existe un plan de structure de support intermédiaire et un plan de substrat électrique inférieur. Lélément rotatif est supporté par une structure de support formée dans le plan de structure de support intermédiaire de manière à pouvoir tourner par rapport à la structure dans un premier axe de rotation. La structure est montée de manière à pouvoir tourner par rapport à un second axe de rotation. La rotation dans le premier axe de rotation est sensiblement indépendante de la rotation dans le second axe de rotation.

LandOfFree

Say what you really think

Search LandOfFree.com for Canadian inventors and patents. Rate them and share your experience with other people.

Rating

Mems device with independent rotation in two axes of rotation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mems device with independent rotation in two axes of rotation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mems device with independent rotation in two axes of rotation will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFCA-PAI-O-1529611

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.