B - Operations – Transporting – 81 – C
Patent
B - Operations, Transporting
81
C
B81C 99/00 (2010.01) B81B 7/02 (2006.01) G02B 26/08 (2006.01)
Patent
CA 2715325
Methods and devices to measure threshold voltages of MEMS devices are disclosed. The threshold voltages are based on test voltages which cause the devices to change states. State changes of the device are detected by monitoring integrated current or charge used to drive the test voltages.
La présente invention concerne des procédés et des dispositifs permettant de mesurer les tensions de seuil de dispositifs micro-électromécaniques "MEMS" (Micro Electro-Mechanical System). Ces tensions de seuil se basent sur des tensions de test qui provoquent les changements d'états des dispositifs. Pour détecter les changements d'états du dispositif, on surveille le courant intégré ou la charge utilisée pour piloter les tensions de test.
Djordjev Kostadin
Govil Alok
Lewis Alan
Van Lier Wilhelmus Johannes Robertus
Qualcomm Mems Technologies Inc.
Smart & Biggar
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