Mems actuators and switches

B - Operations – Transporting – 81 – B

Patent

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Details

B81B 3/00 (2006.01) B81B 7/02 (2006.01) H01H 3/00 (2006.01)

Patent

CA 2678680

The MEMS actuator comprises a hot beam and a cold beam connected to a substrate. Portions of the hot beam are connected together at a common end. A dielectric tether is attached over the common end of the hot beam portions and a free end of the cold beam. The hot beam is configured to exhibit an asymmetric lengthening. This actuator has a better stress distribution compared to an actuator in which both hot beam portions do not have an asymmetric configuration. It also provides a more efficient actuation mechanism that can reduce stress along the structure and reduce the temperature of the hot beam portions during an actuation.

L'invention porte sur un actionneur MEMS qui comprend un bras chaud et un bras froid reliés à un substrat. Des parties de bras chaud sont reliées entre elles en une extrémité commune. Une attache diélectrique est fixée par-dessus l'extrémité commune des parties de bras chaud et par-dessus une extrémité libre du bras froid. Le bras chaud est configuré pour présenter un allongement asymétrique. L'actionneur précité offre une meilleure distribution des contraintes qu'un actionneur dans lequel les deux parties de bras chaud ne présentent pas de configuration asymétrique, et constitue par conséquent un mécanisme d'actionnement plus efficace qui permet, au cours d'un actionnement, de réduire les contraintes qui s'exercent le long de la structure et d'abaisser la température des parties de bras chaud.

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