B - Operations – Transporting – 81 – C
Patent
B - Operations, Transporting
81
C
B81C 1/00 (2006.01) B81B 5/00 (2006.01) B81B 7/02 (2006.01)
Patent
CA 2638477
To reduce cross-talk between adjacent hot electrodes, the present invention provides a ground plane, which extends beneath each side of a MEMS mirror platform covering opposite edges of a hot electrode along each side thereof. The ground plane includes an overhang section extending between the mirror platform and the hot electrode forming a first gap between the hot electrode and the overhang section, and a second gap between the overhang section and the mirror platform. The method of the present invention enables highly accurate construction using lithographic patterning and deep reactive ion etching (DRIE).
Miller John Michael
Moffat Steven Harold
Jds Uniphase Corporation
Teitelbaum & Maclean
LandOfFree
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