A new non-thermal process for annealing crystalline materials

Details A new non-thermal process for annealing crystalline materials A new non-thermal process for annealing crystalline materials

C - Chemistry, Metallurgy

30

B

148/1

C30B 33/00 (2006.01) H01L 21/30 (2006.01) H01L 21/304 (2006.01)

Patent

CA 2271125

Bulk crystalline materials are annealed by introducing into them mechanical energy of sufficient intensity to create a large amplitude sound wave. The mechanical energy may be introduced into the material, for example, by laser ablation. Where the bulk crystalline material is a doped semiconductor, the process also electrically activates the material.

L'invention concerne un procédé de recuit pour matériaux cristallins en vrac, consistant à introduire dans les matériaux une énergie mécanique (par exemple, en ablation par laser) dont l'intensité est suffisante pour engendrer une onde acoustique de forte amplitude. Quand le matériau en question est un semiconducteur dopé, ce procédé entraîne aussi l'activation électrique du matériau.

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