Cantilever probe and apparatus using the same

Details Cantilever probe and apparatus using the same Cantilever probe and apparatus using the same

G - Physics

11

B

G11B 9/00 (2006.01) H01L 41/09 (2006.01)

Patent

CA 2057619

A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element.

'invention est une sonde à cantilever comportant un élément de déplacement du cantilever contenant un matériau piézoélectrique placé entre des électrodes de commande qui servent à déformer ce matériau, une sonde de saisie d'informations avec sortie à l'extrémité libre de l'élément, une électrode d'évacuation pour la sonde et une couche mince non-électroconductrice fixée à une partie au moins de l'une des extrémités de l'élément.

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