B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 7/02 (2006.01) B25J 7/00 (2006.01) B81B 5/00 (2006.01) B81C 1/00 (2006.01) G03F 7/00 (2006.01) H01L 21/60 (2006.01)
Patent
CA 2750918
The present invention relates to design and microfabrication methods for forming devices that are capable of grasping and actively releasing micro or nanometer-sized objects in ambient and vacuum environments. Grasping motion is produced by one or more microactuators, and rapid, accurate, highly reproducible active release is achieved through impacting an adhered object with a high-speed plunging structure. Two fabrication processes for constructing these new types of micro and nano gripping devices are also described.
La présente invention concerne des procédés de conception et de micro-façonnage destinés à former des dispositifs capables de saisir et de libérer activement des objets de taille micrométrique ou nanométrique dans un environnement ambiant et sous vide. Le mouvement de préhension est produit par un ou plusieurs micro-actionneurs et une libération active rapide, précise et hautement reproductible est réalisée par l'intermédiaire d'un impact sur un objet adhérent à l'aide d'une structure plongeante à grande vitesse. Deux processus de façonnage destinés à construire ces nouveaux types de dispositifs de préhension micrométrique ou nanométrique sont également décrits.
Chen K. Brandon
Sun Yu
Zhang Yong
Miller Thomson Llp
The Governing Council Of The University Of Toronto
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