Dual motion electrostatic actuator design for mems micro-relay

Details Dual motion electrostatic actuator design for mems micro-relay Dual motion electrostatic actuator design for mems micro-relay

B - Operations, Transporting

81

B

B81B 3/00 (2006.01) H01H 47/04 (2006.01) H01H 59/00 (2006.01)

Patent

CA 2323189

A dual micro-electromechanical actuator for providing dual actuation to a micromachine. The actuator includes a first substrate upon which a first actuating electrode is formed. A second substrate located proximate to but spaced from the first substrate supports a second actuating electrode. A micromachine device, such as a thin membrane, plate or cantilever, is disposed between the actuating electrodes. When one of the actuating electrodes is selectively activated by applying a voltage thereto, an electrostatic attraction force is produced which causes movement of the micromachine in the direction of the activated actuating electrode.

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