B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 5/00 (2006.01) B81C 1/00 (2006.01) G02B 6/26 (2006.01) G02B 6/35 (2006.01) G02B 26/08 (2006.01) B81B 3/00 (2006.01) B81C 3/00 (2006.01)
Patent
CA 2422985
In an electrostatically operated device in which on the bottom surface side and the top surface side of a movable plate-like electrode are disposed a stationary electrode substrate and a second stationary plate-like electrode substantially in parallel with the movable plate-like electrode; the movable plate-like electrode is maintained at a position that is away by a first predetermined distance from the stationary electrode substrate and by a second predetermined distance from the second stationary plate-like electrode when any drive voltage is not applied to the second stationary plate-like electrode and to the stationary electrode substrate. In operation, a drive voltage more than or less than the pull-in voltage is applied to the second stationary plate-like electrode or the stationary electrode substrate, thereby to drive electrostatically the movable plate-like electrode toward the second stationary plate-like electrode or the stationary electrode substrate.
Japan Aviation Electronics Industry Limited
Kirby Eades Gale Baker
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