B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 5/00 (2006.01) G02B 6/35 (2006.01) G02B 26/08 (2006.01)
Patent
CA 2422384
In an electrostatically operated device manufactured by use of micromachining technology comprising: a stationary electrode substrate; a movable plate-like electrode disposed substantially in parallel with said stationary electrode substrate; and means for supporting said movable plate-like electrode to be movable toward and away from the stationary electrode substrate, a drive voltage less than the pull-in voltage is applied between the stationary electrode substrate and the movable plate-like electrode thereby to electrostatically drive the movable plate-like electrode. In addition, the electrode-to-electrode distance between the movable plate-like electrode and the stationary electrode substrate when any drive voltage is not applied is set to a value greater than three times a distance that the movable plate-like electrode moves when it is electrostatically driven by application of a drive voltage less than the pull-in voltage.
Japan Aviation Electronics Industry Limited
Kirby Eades Gale Baker
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