H - Electricity – 01 – G
Patent
H - Electricity
01
G
H01G 5/16 (2006.01)
Patent
CA 2317068
A tunable capacitor having low loss and a corresponding high Q is provided. The tunable capacitor comprises first and second substrates having first and second capacitor plates disposed, respectively, thereon. The capacitor plates may comprise a high temperature superconductor material. A MEMS actuator, that is either driven by electrostatic force, heat or both, operably contacts the second substrate so that once the actuator is engaged it responds by displacing the second substrate, thereby varying the capacitance between said first capacitor plate and said second capacitor plate. As such, the capacitance can be controlled based upon the relative spacing between the first and second capacitor plates. The MEMS actuator may either be operably attached to the second substrate or detached, yet supporting, the second substrate. A method is also provided for micromachining or otherwise fabricating a tunable capacitor having high temperature superconductor capacitor plates and electrostatic and/or thermal MEMS actuation such that the resulting tunable capacitor has low signal loss and a corresponding high Q. The tunable capacitor can therefore be used in high frequency applications, such as those using radio frequencies.
Dhuler Vijayakumar R.
Jds Uniphase Corporation
Jds Uniphase Inc.
Teitelbaum Neil
LandOfFree
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