B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 7/02 (2006.01) G02B 26/00 (2006.01) G02F 1/01 (2006.01) G09F 9/30 (2006.01)
Patent
CA 2520622
A MEMS device such as an interferometric modulator includes an integrated ESD protection element capable of shunting to ground an excess current carried by an electrical conductor in the MEMS device. The protection element may be a diode and may be formed by depositing a plurality of doped semiconductor layers over the substrate on which the MEMS device is formed.
Idc Llc
Smart & Biggar
LandOfFree
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