B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 7/02 (2006.01) B81C 1/00 (2006.01) G02B 26/00 (2006.01) G02F 1/01 (2006.01) G02F 1/13 (2006.01) G02F 1/21 (2006.01)
Patent
CA 2519656
Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure 70 includes a seal 78 with a chemically reactive getter. Another embodiment of a MEMS device package 800 comprises a primary seal 805 with a getter, and a secondary seal 804 proximate an outer periphery of the primary seal 805. Yet another embodiment of a MEMS device package 900 comprises a getter 902 positioned inside the MEMS device package 900 and proximate an inner periphery 903 of the package seal 78.
Chui Clarence
Cummings William J.
Gally Brian J.
Kothari Manish
Palmateer Lauren
Idc Llc
Smart & Biggar
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