B - Operations – Transporting – 81 – C
Patent
B - Operations, Transporting
81
C
B81C 1/00 (2006.01) B81B 7/00 (2006.01) F15C 5/00 (2006.01) F16L 13/10 (2006.01)
Patent
CA 2400025
A method of attaching a micromechanical fluid control device (62) to a substrate (64) includes the steps of forming a first ring of a first adhesive (70) around an aperture (66) defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between the micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive (72) is applied around the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.
L'invention concerne un procédé de fixation d'un dispositif micromécanique de commande hydraulique (62) sur un substrat (64), consistant à former un premier anneau d'un premier adhésif (70) autour d'une ouverture (66) définie entre un dispositif micromécanique de commande hydraulique et un substrat. Le premier adhésif forme une première interface entre le dispositif micromécanique de commande hydraulique et le substrat, cette interface étant propre et résistante à la corrosion. Un deuxième anneau d'un deuxième adhésif (72) est appliqué autour du premier anneau. Le deuxième adhésif forme une deuxième interface entre le dispositif micromécanique de commande hydraulique et le substrat, cette interface étant hermétique.
Harris James M.
Selser Michael J.
Weber Walter A.
Osler Hoskin & Harcourt Llp
Redwood Microsystems Inc.
Smc Kabushiki Kaisha
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