Method for fabricating micro-structures with various surface...

B - Operations – Transporting – 81 – C

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B81C 1/00 (2006.01) B01D 15/00 (2006.01) B01F 13/00 (2006.01) B01J 19/00 (2006.01) B01L 3/00 (2006.01) B29C 59/14 (2006.01) B29C 67/00 (2006.01) B81B 1/00 (2006.01) G01N 27/00 (2006.01) G01N 27/447 (2006.01) H05K 3/00 (2006.01) G01N 30/28 (2006.01) G01N 30/60 (2006.01)

Patent

CA 2399027

The technology is based on the anisotropic plasma etching of organic polymer sheets partially protected by a metallic mask. The originality of the process is to pattern the surface properties by the same physical means as the one used for the three dimensional fabrication and simultaneously to this fabrication. Surface properties means, but are not limited to hydrophobicity, hydrophilicity, conductivity, reflectability, rugosity and more precisely the chemical and/or physical state of the surface. It is also possible to generate the desired fonctionalities, for instance carboxylic acid, ester, ether, amid or imid, during the etching process. The patterning of the different properties may be achieved by two different techniques that may be used separately or simultaneously.

La technique de l'invention est basée sur la gravure au plasma anisotrope de feuilles de polymère organique partiellement protégées par un masque métallique. L'originalité du procédé de l'invention réside dans le fait qu'il consiste à créer les propriétés de surface par le même moyen physique que celui utilisé pour la fabrication en trois dimensions, en même temps que celle-ci. Les propriétés de surface sont, entre autres, le caractère hydrophobe, caractère hydrophile, le pouvoir réfléchissant, la rugosité et plus précisément l'état chimique et/ou physique de la surface. Il est également possible de générer les fonctionnalités voulues, par exemple l'acide carboxylique, l'ester, l'éther, l'amide ou l'imide, pendant le procédé de gravure. La formation des différentes propriétés peut être assurée par deux techniques différentes pouvant être utilisées séparément ou simultanément.

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