Method for manufacturing carbon nanotubes as functional...

Details Method for manufacturing carbon nanotubes as functional... Method for manufacturing carbon nanotubes as functional...

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) G01Q 60/38 (2010.01) B81C 3/00 (2006.01) C01B 31/02 (2006.01)

Patent

CA 2308015

A system and method for manufacturing carbon nanotubes as functional elements of MEMS devices is disclosed. The method of the present invention comprises the steps of preparing a MEMS substrate for synthesis of a carbon nanotube. A nonosize hole or catalyst retaining structure is fabricated on the MEMS substrate in which a nanotube catalyst is deposited. A nanotube is then synthesized within the nanosize hole.

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