Method for producing a product having a structured surface

Details Method for producing a product having a structured surface Method for producing a product having a structured surface

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) C03B 19/00 (2006.01) C03B 19/02 (2006.01) C03C 4/12 (2006.01) C03C 14/00 (2006.01) C03C 15/00 (2006.01) C03C 17/02 (2006.01) C03C 17/34 (2006.01) C23C 14/10 (2006.01) H01L 21/316 (2006.01) H01L 21/50 (2006.01) H01L 21/56 (2006.01) H01L 21/768 (2006.01) H01L 23/10 (2006.01) H01L 23/29 (2006.01) H01L 23/31 (2006.01) H01L 23/48 (2006.01) H01L 51/52 (2006.01) H01L 23/498 (2006.01) H05K 3/28 (2006.01)

Patent

CA 2480854

The aim of the invention is to provide a method for producing microstructures in glass or in glass-like layers. To this end, an auxiliary substrate (10, 20) having a structured surface (20a) is used, whereby the surface defines a negative mold for the product to be produced. A layer (30) made of glass or of a glass-like material is vapor-deposited onto the structured surface (20a) of the auxiliary substrate. The auxiliary substrate is subsequently removed, e.g. by using wet-chemical techniques, whereby exposing the positive structure. The invention enables the excellent production of microchannels and optical microstructures such as microlenses.

L'invention vise à mettre au point un procédé permettant de produire des microstructures dans des couches en verre ou dans un matériau de type hyaloïde. A cet effet, il est prévu d'utiliser un substrat auxiliaire (10, 20) comportant une surface structurée (20a), ladite surface définissant un moule négatif pour l'article à produire. Une couche (30) de verre ou d'un matériau hyaloïde est déposée par vaporisation sur la surface structurée (20a) du substrat auxiliaire. Le substrat auxiliaire est ensuite enlevé, par ex. par procédé chimique par voie humide, de manière à dégager la structure positive. L'invention s'utilise essentiellement pour produire des microcanaux et des microstructures optiques, telles que des microlentilles.

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