B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 7/00 (2006.01)
Patent
CA 2482077
The invention relates to a method for the production of a microstructure comprising a vacuum cavity. The inventive method comprises the following steps: a) a porous silicon area is produced from a first silicon sheet in order to create either totally or partially a wall of a cavity and to absorb residual gases of said cavity; b) the first silicon sheet is assembled with a second silicon sheet in order to produce said cavity.
L'invention concerne un procédé de fabrication d'une microstructure comportant une cavité sous vide. II comporte les étapes suivantes consistant à : a) réaliser à partir d'une première plaque de silicium, une zone de silicium poreux destinée à constituer totalement ou en partie une paroi de la cavité et apte à absorber des gaz résiduels de la cavité, b) assembler la première plaque de silicium à une deuxième plaque, de manière à réaliser la cavité.
Lefort Pierre-Olivier
Thomas Isabelle
Marks & Clerk
Thales
LandOfFree
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