Method of manufacturing mems devices providing air gap control

Details Method of manufacturing mems devices providing air gap control Method of manufacturing mems devices providing air gap control

B - Operations, Transporting

81

B

B81B 3/00 (2006.01)

Patent

CA 2656530

Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

La présente invention concerne des procédés et un appareil destinés à commander une profondeur d'une cavité entre deux couches d'un dispositif de modulation de la lumière. Un procédé de fabrication d'un dispositif de modulation de la lumière comprend de fournir un substrat, former un couche sacrificielle sur au moins une partie du substrat, former une couche réfléchissante sur au moins une partie de la couche sacrificielle, et former un ou plusieurs dispositifs de commande de la flexion sur le substrat, les dispositifs de commande de la flexion étant configurés de manière à soutenir de manière opérationnelle la couche réfléchissante et à former des cavités, au moment du retrait de la couche sacrificielle, d'une profondeur différente de manière mesurée de l'épaisseur de la couche sacrificielle, dans lequel la profondeur est mesurée perpendiculairement au substrat.

Affiliated with

Also associated with

Rating

Method of manufacturing mems devices providing air gap control does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing mems devices providing air gap control, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing mems devices providing air gap control will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-2052241