Micro-electro-mechanical transducers

Details Micro-electro-mechanical transducers Micro-electro-mechanical transducers

B - Operations, Transporting

81

B

B81B 3/00 (2006.01) B06B 1/02 (2006.01) B81B 5/00 (2006.01) H04R 19/00 (2006.01)

Patent

CA 2607918

A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a substrate, a top plate, and a middle spring layer therebetween. The substrate and the middle spring layer define cavities therebetween sidewalled by standing features. The middle spring layer is anchored by the standing features to create cantilevers over the cavities to enable a vertical displacement of connectors placed on the middle spring layer. The connectors define a transducing space between the middle spring layer and the top plate. The top plate is transported by the vertical displacement of the connectors in a piston-like motion to change the transducing space and to effectuate energy transformation. Various configurations of cantilevers, including single cantilevers, back-to-back double cantilevers and head-to-head double cantilevers (bridges) are possible.

L'invention concerne un transducteur mécanique microélectrique (tel qu'un cMUT), qui comprend un substrat, une plaque supérieure et, entre les deux, une couche ressort médiane. Le substrat et la couche ressort médiane délimitent des cavités dont les parois latérales sont garnies d'éléments verticaux. La couche ressort médiane est ancrée par les éléments verticaux afin de créer au-dessus des cavités des porte-à-faux autorisant un déplacement vertical de connecteurs disposés sur la couche ressort médiane. Les connecteurs délimitent un espace de transduction entre la couche ressort médiane et la plaque supérieure. La plaque supérieure est transportée par déplacement vertical de connecteurs dans un mouvement piston destiné à modifier l'espace de transduction et à effectuer une transformation d'énergie. Diverses configurations de porte-à-faux peuvent être réalisées, dont des porte-à-faux simples, des porte-à-faux doubles accolés dos à dos et des porte-à-faux doubles tête-bêche (ponts).

Affiliated with

Also associated with

Rating

Micro-electro-mechanical transducers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-electro-mechanical transducers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-electro-mechanical transducers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1667306