Micro-electromechanical device, liquid discharge head, and...

B - Operations – Transporting – 81 – B

Patent

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Details

B81B 7/02 (2006.01) B41J 2/015 (2006.01) B41J 2/055 (2006.01) B41J 2/14 (2006.01) B41J 2/16 (2006.01)

Patent

CA 2309232

A micro-electromechanical device comprises a movable member having a fixedly supporting portion and movable portion, and a substrate for having the movable member which is supported in a state having a specific gap with the substrate. For this device, a metallic layer which provides the gap for the movable portion is covered by the fixedly supporting portion of the movable member, and remains to be used as a wiring layer. The wiring layer is electrically connected with a plurality of wirings provided for the substrate. With the structure thus arranged, the electric resistance is made significantly small. The electrical efficiency is enhanced accordingly. Also, the apparatus that adopts this device is made smaller, and the costs of manufacture thereof is made lower as well.

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