B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 5/00 (2006.01) B81C 1/00 (2006.01)
Patent
CA 2417393
A process for making a microdevice that includes the steps of providing a base member and selectively electroforming a support member for supporting a microplatform with respect to the base member. The process also includes the steps of selectively electroforming the microplatform and forming a flexible hinge member for hingedly connecting the microplatform to the support member and allowing relative movement of the microplatform with respect to the support member. This microdevice, when compared to prior art devices, can have improved mechanical strength, rigidity, low deformation, and high planarity.
Processus de fabrication d'un microdispositif comprenant les étapes permettant de fournir un élément de base et de produire par électroformage sélectif un élément de support afin de soutenir une microplateforme par rapport à l'élément de base. Ce processus inclut également les étapes de production par électroformage sélectif de la microplateforme et de fabrication d'un élément charnière reliant la microplateforme à l'élément de support et permettant à la microplateforme de se déplacer par rapport à l'élément d'appui. Ce microdispositif, comparé aux dispositifs antérieurs peut offrir une plus grande force mécanique, une meilleure rigidité, une déformation moins importante et une plus grande planarité.
Jerominek Hubert
Topart Patrice
Institut National D'optique
Robic
LandOfFree
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