Microelectromechanical apparatus with tiltable bodies...

Details Microelectromechanical apparatus with tiltable bodies... Microelectromechanical apparatus with tiltable bodies...

B - Operations, Transporting

81

B

B81B 5/00 (2006.01) B81C 1/00 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2370016

A micromechanical apparatus includes a microelectronic substrate and a tiltable body thereon. The tiltable body includes a plate configured to tilt about an axis parallel to the microelectronic substrate and a tilt stop engaging portion disposed axially adjacent the plate. A range of rotation of the plate about the axis is defined by contact of the tilt stop- engaging portion with a tilt stop on the substrate. The microelectronic substrate may have an opening therein configured to receive the plate, and the tilt stop may include a surface of the microelectronic substrate adjacent the opening. An actuator, such as an electrostatic actuator, may tilt the tiltable body about the axis. Related operation and fabrication methods are also described.

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