Microelectromechanical devices

Details Microelectromechanical devices Microelectromechanical devices

B - Operations, Transporting

81

B

B81B 7/02 (2006.01) E21B 41/00 (2006.01) E21B 43/1185 (2006.01) H01T 2/02 (2006.01)

Patent

CA 2496860

An apparatus includes a switch comprising microelectromechanical elements, the microelectromechanical elements including a sealed chamber containing a dielectric element, and conductors in the sealed chamber. The conductors are arranged such that application of greater than a predetermined voltage to at least one of the conductors causes ionization breakdown of the dielectric element to provide an electrically conductive path between the conductors. In another implementation, a switch includes a nanotube electron emitter or a radioactive isotope electron emitter.

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