B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 3/00 (2006.01)
Patent
CA 2609614
A microelectromechanical system (MEMS) device may include a substrate and at least one movable member supported by the substrate. The at least one movable member may include a superlattice including a plurality of stacked groups of layers with each group of layers of the superlattice comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
Un système microélectromécanique (MEMS) peut comprendre un substrat et au moins un élément amovible supporté par le substrat. Cet élément amovible peut comprendre un réseau superposé constitué d'une pluralité de groupes empilés de couches, chaque groupe de couches du réseau superposé comprenant une pluralité de monocouches semi-conductrices de base empilées définissant une partie semi-conductrice de base, et au moins une monocouche non semi-conductrice confinée dans un réseau cristallin de parties semi-conductrices de base adjacentes.
Mears Technologies Inc.
Teitelbaum & Maclean
LandOfFree
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