Micromachined element and method of fabrication thereof

Details Micromachined element and method of fabrication thereof Micromachined element and method of fabrication thereof

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) B81B 3/00 (2006.01)

Patent

CA 2305069

A micromachined element mounted to a substrate, the element including a cantilever having a proximal portion attached to the substrate and a coilable distal portion terminating in a free distal end. The coilable distal portion, upon being heated, is capable of bending away from the substrate and at least partially coiling upon itself to form a coiled portion. At least part of the micromachined element may be electrically conductive. In various embodiments, the micromachined element may function as a mechanical microspring, an electrically conductive link, and/or a magnetic coil. A method of fabricating the microelement may include the steps of selectively depositing various layers upon the substrate.

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