B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 7/00 (2006.01)
Patent
CA 2511836
Micromechanical (10; 20) or microoptoelectronic (30) devices are described which comprises a deposit of getter material (17; 25; 35) for the sorption of gases being detrimental to the operation of said devices and an integrated system (18, 18~, 19, 19~) for heating the getter material from the outside at each moment this is required during the life of the device. Various embodiments of a support for manufacturing these devices are also described.
L'invention concerne des dispositifs micro-mécaniques (10; 20) ou des dispositifs micro-optico électroniques (30) comprenant un dépôt de matériau de dégazage (17; 25; 35) pour la sorption de gaz qui gênent le fonctionnement de ces dispositifs, et un système intégré (18, 18', 19, 19') servant à chauffer le matériau de dégazage depuis l'extérieur à chaque moment requis au cours de la durée d'utilisation du dispositif. L'invention porte aussi sur plusieurs modes de réalisation d'un support destiné à la fabrication de ces dispositifs.
Gowling Lafleur Henderson Llp
Saes Getters S.p.a.
LandOfFree
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