Micromirror device with a hybrid actuator

Details Micromirror device with a hybrid actuator Micromirror device with a hybrid actuator

B - Operations, Transporting

81

B

B81B 7/02 (2006.01) B81B 3/00 (2006.01) G02B 5/08 (2006.01) G02B 26/08 (2006.01) H02N 1/00 (2006.01)

Patent

CA 2612206

A hybrid electro-static actuator for rotating a two-dimensional micro-electromechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub- frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.

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