Multi-port monolithic rf mems switches and switch matrices

Details Multi-port monolithic rf mems switches and switch matrices Multi-port monolithic rf mems switches and switch matrices

B - Operations, Transporting

81

B

B81B 3/00 (2006.01) B81B 7/02 (2006.01) H01P 1/10 (2006.01)

Patent

CA 2584084

A multi-port RF MEMS switch, a switch matrix having several multi-port RF MEMS switches and an interconnect network have a monolithic structure with clamped-clamped beams, cantilever beams or thermally operated actuators. A method of fabricating a monolithic switch has clamped-clamped beams or cantilever beams.

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