Multi-stable micro electromechanical switches and methods of...

B - Operations – Transporting – 81 – B

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B81B 3/00 (2006.01) H01H 50/00 (2006.01) H01H 59/00 (2006.01)

Patent

CA 2524388

A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy.

La présente invention concerne un commutateur micro-électromécanique (MEMS) conçu pour être utilisé dans des dispositifs médicaux, ainsi que des procédés de production et d'utilisation de commutateurs MEMS. Dans un mode de réalisation de l'invention, un commutateur micro-électromécanique comportant un élément mobile conçu pour coopérer électriquement avec une borne réceptrice est formé sur un substrat. L'élément mobile et la borne réceptrice comportent chacun une couche isolante à proximité du substrat et une couche conductrice à proximité de la couche isolante à l'opposé du substrat. Dans divers modes de réalisation, les couches conductrices de l'élément mobile et/ou de la borne réceptrice comportent une région en saillie qui s'étend vers l'extérieur du substrat pour coupler de manière commutable les couches conductrices de l'élément mobile et la borne réceptrice afin de former un commutateur. Ce commutateur peut être actionné au moyen, par exemple, d'une énergie électrostatique.

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