Optical microelectromechanical structure

Details Optical microelectromechanical structure Optical microelectromechanical structure

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) B81B 7/00 (2006.01)

Patent

CA 2529935

The invention relates to an optical microelectromechanical structure (MEMS) comprising - an (at least one) optically transmissive layer (UTL) - an (at least one ) intermediate layer structure (IL) - a (at least one) device layer (DL) said intermediate layer structure (IL) defining one or more optical paths (OP) between said substantially optically transmissive layer (UTL) and said device layer (DL), said intermediate structure layer (IL) defining the distance (d) between said optically transmissive layer (UTL) and said device layer (DL).

L'invention concerne une structure microélectromécanique optique (MEMS) comprenant au moins une couche optiquement transmissive (UTL) ; au moins une structure en couches intermédiaires (IL) ; au moins une couche de dispositif (DL). Ladite structure en couches intermédiaires (IL) définit un ou plusieurs trajets optiques (OP) entre lesdites couche sensiblement optiquement transmissive (UTL) et couche de dispositif (DL) ; elle définit également la distance (d) entre la couche optiquement transmissive (UTL) et la couche de dispositif (DL).

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