B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 3/00 (2006.01) G01P 15/125 (2006.01) G01C 19/56 (2006.01) G01P 9/04 (2006.01)
Patent
CA 2586707
The invention relates to measuring devices used in measuring angular velocity, and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensor of angular velocity according to the present invention seismic masses (1, 2, 36, 37) are connected to suppor areas by means of springs or by means of springs and stiff auxiliary structures, which give the masses (1, 2, 36, 37) a degree of freedom in relation to an axis of rotation perpendicular to the plane of the wafer formed by the masse and in relation to at least one axis of rotation parallel to the plane of the wafer. The structure of the sensor of angular velocity according to the present invention enables reliable and efficient measuring particularly in compact oscillating micro-mechanical sensors of angular velocity.
La présente invention concerne des dispositifs de mesure utilisés dans la mesure de la vitesse angulaire et, plus spécifiquement, des capteurs oscillants micromécaniques de vitesse angulaire. Dans le capteur de vitesse angulaire selon la présente invention, des masses sismiques (1, 2, 36, 37) sont reliées à des zones de support au moyen de ressorts, ou au moyen de ressorts et de structures auxiliaires rigides, qui donnent aux masses (1, 2, 36, 37) un degré de liberté par rapport à un axe de rotation perpendiculaire au plan de la plaquette formée par la masse et par rapport à au moins un axe de rotation parallèle au plan de la plaquette. La structure du capteur de vitesse angulaire selon la présente invention permet une mesure fiable et efficace, particulièrement dans les capteurs oscillants micromécaniques de vitesse angulaire compacts.
Bereskin & Parr Llp/s.e.n.c.r.l.,s.r.l.
Vti Technologies Oy
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