Radiation sensor, wafer, sensor module, and method for the...

Details Radiation sensor, wafer, sensor module, and method for the... Radiation sensor, wafer, sensor module, and method for the...

B - Operations, Transporting

81

B

B81B 3/00 (2006.01) G01J 5/12 (2006.01) G01K 7/02 (2006.01) G01K 7/22 (2006.01) H01L 35/02 (2006.01) H01L 35/32 (2006.01)

Patent

CA 2524483

Disclosed is a radiation sensor (10) comprising a support (1), a lowered area (2) that is embodied within a surface of the support (1) and can represent a depression or a through hole, a sensor element (4, 4a, 4b) which is embodied above the lowered area (2), preferably on a membrane (3) spanning the lowered area (2), and electrical contacts (5, 5a, 5b) for the sensor element (4, 4a, 4b). The lowered area (2) has an entirely or partly rounded contour (2a) within the surface of the support (1).

Capteur de rayonnement (10) qui possède un support (1), une cavité (2) formée dans une surface du support (1) et pouvant être un évidement ou un trou traversant, un élément capteur (4, 4a, 4b) formé sur la cavité (2), de préférence sur une membrane (3) tendue au-dessus de la cavité (2), et des contacts électriques (5, 5a, 5b) pour l'élément capteur (4, 4a, 4b). Au niveau de la surface du support (1), la cavité (2) possède un contour entièrement ou partiellement arrondi (2a).

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