Silicon oxide film

C - Chemistry – Metallurgy – 23 – C

Patent

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Details

C23C 16/40 (2006.01) B32B 9/00 (2006.01) C01B 33/12 (2006.01) C23C 16/02 (2006.01) C23C 16/04 (2006.01)

Patent

CA 2415495

A silicon oxide membrane formed on a surface of a plastic substrate, characterized in that methyl groups and methylene groups are present in the vicinity of its side of the interface between the membrane and the plastic substrate. The silicon oxide membrane not only is excellent in the adhesion to a plastic substrate, and in softness and flexibility, but also exhibits excellent gas barrier properties, which leads to the achievement of satisfactory gas barrier property with a less thickness as compared to that of a conventional silicon oxide membrane. Further, the above membrane can be produced with excellent productivity.

L'invention concerne une membrane en oxyde de silicone formée à la surface d'un substrat en plastique, qui se caractérise en ce que des groupes méthyles et des groupes méthylènes sont présents à proximité de la face de son interface entre la membrane et le substrat en plastique. La membrane en oxyde de silicone non seulement présente d'excellentes qualités d'adhérence à un substrat en plastique, de douceur et de souplesse, mais possède aussi d'excellentes propriétés de perméabilité au gaz, ce qui lui confère une perméabilité au gaz satisfaisante pour une épaisseur moindre par comparaison avec une membrane en oxyde de silicone classique. En outre, la membrane de l'invention peut être produite avec un excellent rendement.

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