Soft mems

B - Operations – Transporting – 81 – B

Patent

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Details

B81B 1/00 (2006.01) B32B 7/02 (2006.01) B81C 1/00 (2006.01) H01L 21/60 (2006.01) H01L 23/48 (2006.01) H01L 51/00 (2006.01)

Patent

CA 2653557

A microscale polymer-based apparatus comprises a substrate formed from a first polymer material and at least one active region integrated with the substrate. The at least one active region is patterned from a second polymer material that is modified to perform at least one function within the at least one active region.

L'invention concerne un appareil à base de polymère à microéchelle, qui comprend un substrat formé à partir d'un premier matériau polymère et au moins une région active intégrée au substrat. La et au moins une région active forme un motif à partir d'un second matériau polymère qui est modifié pour effectuer au moins une fonction dans la et au moins une région active.

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