Staggered vertical comb drive fabrication method

Details Staggered vertical comb drive fabrication method Staggered vertical comb drive fabrication method

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) G02B 26/08 (2006.01) H02N 1/00 (2006.01)

Patent

CA 2584571

The invention relates to a method of fabrication of staggered vertical comb drive actuators with relaxed lateral alignment tolerances. A device layer of a wafer is first etched from a front side using a self-aligned two-layer mask to define interdigited fingers of both moving and stationary combs. A second etch step is used for vertically thinning one of the two sets of fingers by selectively removing their top portions. The front side of the wafer is then bonded to a carrier wafer. The wafer is then selectively etched from the back side of the device layer so as to remove lower portions of the second set of fingers, thereby forming interdigited moving and stationary combs having vertically offset fingers.

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