System and method for display device with activated desiccant

Details System and method for display device with activated desiccant System and method for display device with activated desiccant

B - Operations, Transporting

81

B

B81B 7/02 (2006.01) B81C 1/00 (2006.01) G02B 26/00 (2006.01) G02B 26/08 (2006.01) G02B 27/00 (2006.01) G02F 1/01 (2006.01) G02F 1/13 (2006.01)

Patent

CA 2517413

A MEMS device package 70 comprises a substrate 72 with a MEMS device 76 formed thereon, a backplane 74 a seal 78 and an inactive desiccant 80 within the package. The desiccant 80 is activated after assembly of the package by exposure to an environmental change or an activating substance. A method of manufacturing a MEMS device comprises activating a desiccant and contacting a substrate with the MEMS device formed thereon, a seal, and a backplane, wherein the desiccant is disposed on the substrate or the backplane.

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