Micro-electro-mechanical transducer having an insulation...

Details Micro-electro-mechanical transducer having an insulation... Micro-electro-mechanical transducer having an insulation...

B - Operations, Transporting

81

B

B81B 3/00 (2006.01) B81B 7/02 (2006.01) H04R 19/00 (2006.01)

Patent

CA 2608164

A micro-electro-mechanical transducer (such as a cMUT) having two electrodes separated by an insulator with an insulation extension is disclosed. The two electrodes define a transducing gap therebetween. The insulator has an insulating support disposed generally between the two electrodes and an insulation extension extending into at least one of two electrodes to increase the effective insulation without having to increase the transducing gap. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate.

L'invention concerne un transducteur microélectromécanique (tel qu'un cMUT) présentant deux électrodes séparées par un isolant présentant une extension d'isolation. Les deux électrodes définissent un espace de transduction entre elles. L'isolateur présente un support isolant disposé généralement entre les deux électrodes et une extension d'isolation s'étendant dans au moins une des deux électrodes afin d'augmenter l'isolation efficace sans avoir à augmenter l'espace de transduction. L'invention concerne également des procédés de fabrication du transducteur microélectromécanique. Lesdits procédés peuvent être utilisés dans des cMUT à base de membranes classiques et dans des cMUT présentant des ressorts intégrés supportant une plaque supérieure rigide.

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